Substrate transfer device for semiconductor deposition apparatus



FIG. 1 is a perspective view of a substrate transfer device that may bepositioned in a semiconductor deposition apparatus, showing our newdesign;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a left side elevation view thereof;

FIG. 5 is a right side elevation view thereof;

FIG. 6 is a top plan view thereof; and,

FIG. 7 is a bottom plan view thereof.

The ornamental design which is claimed is shown in solid lines in thedrawings.

The ornamental design for a substrate transfer device for semiconductordeposition apparatus, as shown and described.